Electrochemical Deposition of Silicon-Carbon Films: A Study on the Nucleation and Growth Mechanism.

Nanomaterials (Basel)

Institute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, Chekhov str. 2, 347928 Taganrog, Russia.

Published: December 2019

Silicon-carbon films have been deposited on silicon and AlO/Cr-Cu substrates, making use of the electrolysis of methanol/dimethylformamide-hexamethyldisilazane (HMDS) solutions. The electrodeposited films were characterized by Raman spectroscopy and scanning electron microscopy, respectively. Moreover, the nucleation and growth mechanism of the films were studied from the experimental current transients.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6955895PMC
http://dx.doi.org/10.3390/nano9121754DOI Listing

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