Quartz tuning fork mass change sensing for FIB/SEM technology.

In this paper we present a metrological method for determination of mass density of focused ion beam induced deposition (FIBID) materials using quartz tuning fork (QTF) mass change sensors. Dimension and density determination of FIBID deposited nanostructures is necessary to develop and reliable and repeatable microfabribrication technology of the highest versatility. The proposed metrological methodology allows to determine mass change with 5 pg resolution and accuracy below 5 % if density is considered. The described method is suitable for precise FIBID precursor parameters determination conducted during the deposition as actuation and signal read-out of the applied QTF can be performed electrically. High accuracy, resolution and stability are ensured due to excellent properties of quartz forming the sensor structure.