A reproducible graphene-induced in situ process is demonstrated for the first time for growing large-scale monolayer and bilayer cubic silicon carbide (SiC) crystals on a liquid Cu surface by chemical vapor deposition (CVD) method. Precise control over the morphology of SiC crystals is further realized by modulating growth conditions, thus leading to the formation of several shaped SiC crystals ranging from triangular, rectangular, pentagonal, and even to hexagonal kind. Simulations based on density functional theory are carried out to elucidate the growth mechanism of SiC flakes with various morphologies, which are in striking consistency with experimental observations. In the liquid Cu-assisted CVD system, growth temperature (∼1100 °C) enables sublimation and deposition of silicon oxide (SiO) derived from quartz tube, while liquid Cu facilitates preformation of graphene originated from methane. The SiO and graphene, grown and reacted in situ in the CVD process, are served as the silicon and carbon source for the cubic SiC crystals, respectively. Moreover, the gradual transformation process from SiO particles to SiC flakes is directly observed, with several middle stages clearly displayed. The direct in situ growth of SiC crystals offers a novel method for scaled production of SiC crystals and is beneficial to understand its growth mechanism, and thus push forward the way to develop high-temperature and high-frequency electronic devices.
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http://dx.doi.org/10.1021/acsami.9b14069 | DOI Listing |
Materials (Basel)
November 2024
Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET), Jinju 52851, Republic of Korea.
A recent study reported the rapid growth of SiC single crystals of ~1.5 mm/h using high-purity SiC sources obtained by recycling CVD-SiC blocks used as materials in semiconductor processes. This method has gained attention as a way to improve the productivity of the physical vapor transport (PVT) method, widely used for manufacturing single crystal substrates for power semiconductors.
View Article and Find Full Text PDFMaterials (Basel)
November 2024
Busan Center, Korea Basic Science Institute, Busan 46742, Republic of Korea.
This study aims to develop a reference material that enables precise management of dopant distribution in power semiconductors. We thoroughly investigate the structural and surface properties of 4H-silicon carbide (4H-SiC) single crystals implanted without annealing using aluminum (Al) and phosphorus (P) ions. Ion-implanted 4H-SiC was thoroughly evaluated using advanced techniques, including X-ray diffraction (XRD), field emission transmission electron microscopy (FE-TEM), atomic force microscopy (AFM), time of flight medium energy ion scattering (ToF-MEIS), and secondary ion mass spectrometry (SIMS).
View Article and Find Full Text PDFJ Synchrotron Radiat
January 2025
Università degli Studi di Catania, Dipartimento di Fisica e Astronomia `Ettore Majorana', Via Santa Sofia 64, 95123 Catania, Italy.
For many synchrotron radiation experiments, it is critical to perform continuous, real-time monitoring of the X-ray flux for normalization and stabilization purposes. Traditional transmission-mode monitors included metal mesh foils and ionization chambers, which suffered from low signal stability and size constraints. Solid-state detectors are now considered superior alternatives for many applications, offering appealing features like compactness and signal stability.
View Article and Find Full Text PDFLangmuir
December 2024
State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian, 116024, China.
Single-oxidant slurries are prevalently utilized in chemical and mechanical polishing (CMP) of 4H-SiC crystal. Nevertheless, it is a challenge to achieve a high material removal rate (MRR) and surface quality using single oxidant slurries to meet the needs of global planarization and damage-free nanoscale surface processing of SiC wafers. To solve this challenge, a novel method is proposed for SiC CMP processing using the double oxidant slurry.
View Article and Find Full Text PDFMaterials (Basel)
November 2024
Advanced Energy Storage Technology Center, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China.
The drilling of State-of-the-Art printed circuit boards (PCBs) often leads to shortened tool lifetime and low drilling accuracy due to improved strength of the PCB composites with nanofillers and higher thickness-to-hole diameter ratio. Diamond coatings have been employed to improve the tool lifetime and drilling accuracy, but the coated microdrills are brittle and suffer from coating delamination. To date, it is still difficult to deposit diamonds on ultrathin microdrills with diameters lower than 0.
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