This review article presents the literature survey on radio frequency (RF)-magnetron sputtered LiCoO thin films used as cathode materials in all-solid-state rechargeable lithium microbatteries. As the process parameters lead to a variety of texture and preferential orientation, the influence of the sputtering conditions on the deposition of LiCoO thin films are considered. The electrochemical performance is examined as a function of composition of the sputter Ar/O gas mixture, gas flow rate, pressure, nature of substrate, substrate temperature, deposition rate, and annealing temperature. The state-of-the-art of lithium microbatteries fabricated by the rf-sputtering method is also reported.
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| http://dx.doi.org/10.3390/ma12172687 | DOI Listing |
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