Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...].
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680467 | PMC |
| http://dx.doi.org/10.3390/mi10070458 | DOI Listing |
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