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A MEMS-Based Quad-Wavelength Hybrid Plasmonic-Pyroelectric Infrared Detector. | LitMetric

AI Article Synopsis

  • Spectrally selective detection is essential for various applications like gas sensing and thermal imaging, and this paper introduces a quad-wavelength hybrid detector that operates at four distinct infrared wavelengths (3.3, 3.7, 4.1, and 4.5 μm).
  • The device works by coupling infrared light to specific resonant modes using plasmonic absorbers made from an aluminum disk array on a bilayer structure, integrated with a zinc oxide pyroelectric film.
  • Utilizing MEMS technology, the detector is compact and operates at room temperature with high responsivity (100-140 mV/W), offering advantages like wavelength tunability and high spectral resolution over standard photodetectors.

Article Abstract

Spectrally selective detection is of crucial importance for diverse modern spectroscopic applications such as multi-wavelength pyrometry, non-dispersive infrared gas sensing, biomedical analysis, flame detection, and thermal imaging. This paper reports a quad-wavelength hybrid plasmonic-pyroelectric detector that exhibited spectrally selective infrared detection at four wavelengths-3.3, 3.7, 4.1, and 4.5 μm. The narrowband detection was achieved by coupling the incident infrared light to the resonant modes of the four different plasmonic perfect absorbers based on Al-disk-array placed on a AlO-Al bilayer. These absorbers were directly integrated on top of a zinc oxide thin film functioning as a pyroelectric transducer. The device was fabricated using micro-electromechanical system (MEMS) technology to optimize the spectral responsivity. The proposed detector operated at room temperature and exhibited a responsivity of approximately 100-140 mV/W with a full width at half maximum of about 0.9-1.2 μm. The wavelength tunability, high spectral resolution, compactness and robust MEMS-based platform of the hybrid device demonstrated a great advantage over conventional photodetectors with bandpass filters, and exhibited impressive possibilities for miniature multi-wavelength spectroscopic devices.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6631002PMC
http://dx.doi.org/10.3390/mi10060413DOI Listing

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