Resistivity changes of magnetron sputtered, amorphous CrAlC thin films were measured during heating in vacuum. Based on correlative X-ray diffraction, in-situ and ex-situ selected area electron diffraction measurements and differential scanning calorimetry data from literature it is evident that the resistivity changes at 552 ± 4 and 585 ± 13 °C indicate the phase transitions from amorphous to a hexagonal disordered solid solution structure and from the latter to MAX phase, respectively. We have shown that phase changes in CrAlC thin films can be revealed by in-situ measurements of thermally induced resistivity changes.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6547878 | PMC |
| http://dx.doi.org/10.1038/s41598-019-44692-4 | DOI Listing |
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