Investigation of Nitridation on the Band Alignment at MoS/HfO Interfaces.

Nanoscale Res Lett

State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China.

Published: May 2019

AI Article Synopsis

  • The study examines how nitridation treatment affects the band alignment between few-layer MoS (molybdenum disulfide) and HfO (hafnium oxide) using X-ray photoelectron spectroscopy.
  • The findings show that nitridation leads to changes in valence and conduction band offsets, with values shifting from (2.09 eV, 2.41 eV) to (2.34 eV, 2.16 eV).
  • The results suggest that the change in band alignment is due to the formation of Mo-N bonds and surface adjustments in HfO, indicating potential applications in energy band engineering for various two-dimensional material integrations.

Article Abstract

The effect of nitridation treatment on the band alignment between few-layer MoS and HfO has been investigated by X-ray photoelectron spectroscopy. The valence (conduction) band offsets of MoS/HfO with and without nitridation treatment were determined to be 2.09 ± 0.1 (2.41 ± 0.1) and 2.34 ± 0.1 (2.16 ± 0.1) eV, respectively. The tunable band alignment could be attributed to the Mo-N bonding formation and surface band bending for HfO triggered by nitridation. This study on the energy band engineering of MoS/HfO heterojunctions may also be extended to other high-k dielectrics for integrating with two-dimensional materials to design and optimize their electronic devices.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6541675PMC
http://dx.doi.org/10.1186/s11671-019-3020-0DOI Listing

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