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Multimodal Sensing with a Three-Dimensional Piezoresistive Structure. | LitMetric

Multimodal Sensing with a Three-Dimensional Piezoresistive Structure.

ACS Nano

Center for Bio-Integrated Electronics, Departments of Materials Science and Engineering, Biomedical Engineering, Chemistry, Mechanical Engineering, Electrical Engineering and Computer Science, and Neurological Surgery, Simpson Querrey Institute for Nano/biotechnology, McCormick School of Engineering and Feinberg School of Medicine , Northwestern University, Evanston , Illinois 60208 , United States.

Published: October 2019

AI Article Synopsis

  • Researchers have developed a microelectromechanical sensor that mimics skin receptors, which could improve artificial interactions with the environment.
  • The sensor features monocrystalline silicon nanomembranes that measure various mechanical stimuli—like force and temperature—simultaneously and with high sensitivity.
  • This technology allows for quick response times and can be easily made in large quantities, with the added benefit of integrating wireless data capabilities for easy use with consumer devices.

Article Abstract

Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements in a configuration that enables separate, simultaneous measurements of multiple mechanical stimuli, such as normal force, shear force, and bending, along with temperature. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices.

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Source
http://dx.doi.org/10.1021/acsnano.9b02030DOI Listing

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