This article represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.
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|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6513016 | PMC |
| http://dx.doi.org/10.1116/1.5025060 | DOI Listing |
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