Effect of Nitrogen Flow Ratio on Composition, Microstructure, and Mechanical Properties of Cr-B-O-N Films Deposited by Pulsed Direct Current Magnetron Sputtering.

Nano-crystalline CrB₂ and Cr-B-O-N films with various nitrogen flow ratios were deposited using a pulsed direct current (PDC) magnetron sputtering technique. By means of electron probe micro-analysis, X-ray diffraction (XRD), X-ray photoelectron spectroscopy, scanning electron microscopy, high-resolution transmission electron microscopy (HRTEM), and atomic force microscopy, the influences of the nitrogen flow ratio on the phase constituents and microstructures of CrB₂/Cr-B-O-N films were systematically investigated. Mechanical properties including the hardness and elastic modulus were explored by a nano-indentation tester. On increasing the nitrogen flow ratio, the N and O contents in films increased linearly and tended to become saturated, whereas the Cr and B contents decreased. With an increasing nitrogen flow ratio, the microstructure changed from a dense columnar structure to a bulky columnar structure, and then to a fine and stacked dense structure. Meanwhile, the deposition rate also changed with increasing nitrogen flow ratio, owing to the changes in structure. Crystalline phases were observed by the XRD and HRTEM analyses, consisting of several nanometer-size crystallites embedded in an amorphous matrix. The dramatically decreased hardness was attributed to the large fractional volume of the softer amorphous phase BN in films.