We report on the investigation of titanium nitride (TiN) thin films deposited via atomic layer deposition (ALD) for microwave kinetic inductance detectors (MKID). Using our in-house ALD process, we have grown a sequence of TiN thin films (thickness 15, 30, 60 nm). The films have been characterised in terms of superconducting transition temperature , sheet resistance and microstructure. We have fabricated test resonator structures and characterised them at a temperature of 300 mK. At 350 GHz, we report an optical noise equivalent power , which is promising for passive terahertz imaging applications.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190646 | PMC |
| http://dx.doi.org/10.1007/s10909-018-2023-z | DOI Listing |
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