To ensure the high performance of beamlines in Taiwan Photon Source, the metrology of the beamline optical components is essential to realize the theoretical optical simulation. The design and performance of a long-trace profiler (LTP) with moving optical head is described. A LTP is used as a metrological tool for the assembly and correction of optical components at the beamline. For a water-cooled mirror, a LTP serves to optimize the surface profile to a slope error of 0.1 µrad (rms) and adequate thermal conductance. To correct a bendable cooling mirror in a twisted condition, the sagittal slope is decreased by a screw adjustment through the LTP measurement. For the double-crystal monochromator (DCM) with flow-induced vibrations, we proposed an approach to stiffen the bellows hose partially inside the vacuum chamber. From an investigation of the vibrational spectra of the DCM before and after the treatment with the aid of the autocollimator, the current approach is confirmed to be an effective solution for suppression of vibration.
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