AI Article Synopsis
- An x-ray ellipsoidal mirror is crucial for focusing soft x-rays, but creating one with the required nanometer-level accuracy is challenging, especially for small diameters.* -
- Researchers developed a method to fabricate these mirrors using nickel sulfamate electroforming on a high-precision quartz mandrel that has the mirror's inverted shape.* -
- A mirror measuring 40-mm in length was created, showing a replication error of 27.2 nm overall and 14.7 nm in the central area, enabling the potential to focus soft x-rays down to a 400 nm diameter spot.*
Article Abstract
An x-ray ellipsoidal mirror is an ideal tool for focusing soft x-rays. Because nanometer-level shape accuracy is required in the internal surface of a mirror having a small diameter, it is difficult to fabricate the mirror by processing the surface directly. We developed a fabrication process for soft x-ray ellipsoidal mirrors in which the surface of a high-precision quartz mandrel with the inverted shape of the designed mirror is replicated by nickel sulfamate electroforming. In this study, an ellipsoidal mirror of 40-mm length was fabricated and the shape accuracy of the replicated surface was evaluated by a measurement method using a contact probe. The root mean square (RMS) of the replication error in the entire measured surface was 27.2 nm. When the evaluated area was half the replicated surface near the middle of the mirror, the RMS of the replication error was 14.7 nm. Wave-optical simulation suggested that it is possible to focus soft x-rays to a spot with a diameter of 400 nm.
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| http://dx.doi.org/10.1063/1.5057432 | DOI Listing |
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