We report on tellurium-oxide (TeO)-coated silicon nitride microring resonators with internal quality factors up to 7.3×10, corresponding to 0.5 dB/cm waveguide loss, at wavelengths around 1550 nm. The microring resonators are fabricated using a silicon nitride foundry process followed by TeO coating deposition in a single post-processing step. The silicon nitride strip height of 0.2 μm enables a small microring bending radius, while the TeO coating thickness of 0.33 μm results in a large modal overlap with the TeO layer. These results are a promising step towards realizing compact and high-performance linear, nonlinear, and rare-earth-doped active integrated photonic devices with this platform.
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| http://dx.doi.org/10.1364/OL.44.000118 | DOI Listing |
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