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A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide. | LitMetric

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide.

Sensors (Basel)

Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada.

Published: November 2018

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device's sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/°C and a limit of detection of 2.2 × 10 RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6263654PMC
http://dx.doi.org/10.3390/s18114061DOI Listing

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