Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...].
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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187504 | PMC |
http://dx.doi.org/10.3390/mi9050237 | DOI Listing |
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