Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...].

Download full-text PDF

Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6187504PMC
http://dx.doi.org/10.3390/mi9050237DOI Listing

Publication Analysis

Top Keywords

editorial special
4
special issue
4
issue piezoelectric
4
piezoelectric mems
4
mems electromechanical
4
electromechanical transducers
4
transducers utilize
4
utilize piezoelectric
4
piezoelectric increasingly
4
increasingly micro-electromechanical
4

Similar Publications

Want AI Summaries of new PubMed Abstracts delivered to your In-box?

Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!