In this paper, we present two design methods to improve the performance of disk resonator gyroscope (DRG), including decreasing the frequency split and increasing the quality factor (Q). The structure parameters, which can affect the frequency split and Q value were concluded with the help of the FEM software. Meanwhile, devices with different parameters were designed, fabricated, and tested, and the experimental result was in accordance with the simulation. With the proposed methods, the DRG was selected with a high Q value and a low frequency split to satisfy the demand of high performance. The weakness and future works were pointed at last.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190373 | PMC |
| http://dx.doi.org/10.3390/mi8100296 | DOI Listing |
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