Quantitative wavefront measurements are demonstrated using a Hartmann mask re-imaged onto a camera. The wavefront is reconstructed using standard algorithms applied to the difference of beamlet centroids determined from fluence distributions obtained for two different longitudinal locations of the mask. The wavefront of the optical wave in the object plane is measured independently of imaging-system collimation. Apodization obtained with spatially dithered distributions of small transparent or opaque pixels improves the measurement accuracy by reducing the spatial-frequency content of the mask holes. Simulations and experiments demonstrate the excellent accuracy of this diagnostic over a wide range of parameters, making it suitable, for example, to characterize laser systems.
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