Ultrasmooth surfaces with sub-nanometer roughness and low damage are a great challenge for optical fabrication. Ion beam sputtering (IBS) has obvious advantages on the improvement of surface quality and the removal of surface defects. However, surface defects with different properties and structures display different evolution laws during the IBS process, which affects the roughness change and needs classification studies. In this paper, classification experiments are carried out to study the surface topography evolution of plastic scratches, brittle scratches, and micro-particles during the IBS process. The plastic scratches and micro-particles can be removed, while the brittle scratches can be passivated, so that surface defects can be reduced and surface quality improved. The corresponding evolution mechanisms are discussed in depth, and we show that micro-topography characteristics and material properties are important factors affecting the evolution of surface topography. Through the summary of evolution laws of different surface states, the Gaussian distribution law of surface roughness is established. The evolution regularity and mechanism of surface roughness during the IBS process are expounded upon from the perspective of microscopic morphology, which lays a foundation for ultra-smooth surface manufacturing with low damage.
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http://dx.doi.org/10.1364/AO.57.005566 | DOI Listing |
ACS Appl Mater Interfaces
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Center of Nanomaterials for Renewable Energy, State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, Xìan, Shaanxi 710049, China.
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Guizhou University, Key Laboratory of Green Pesticide and Agricultural Bioengineering, Ministry of Education, Huaxi District, Guiyang, Guizhou Province of China, Guiyang, China, 550025;
Gray mold is an important disease of crops and is widespread, harmful, difficult to control, and prone to developing fungicide resistance. Screening new fungicides is an important step in controlling this disease. Hydroxychloroquine is an anti-inflammatory and anti-malarial agent, which has shown marked inhibitory activity against many fungi in medicine.
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Enzyme and Microbial Research Center, Faculty of Biotechnology and Biomolecular Sciences, Universiti Putra Malaysia, 43400, Serdang, Selangor, Malaysia.
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