The application of single-pass multifrequency Kelvin probe force microscopy (KPFM) for topography and contact potential difference (CPD) measurements of organic self-assembled monolayers (SAM) is demonstrated. Four modes of mechanical and electrical cantilever excitation were tested in order to obtain the best possible resolution in the CPD measurements. The algorithm using maximum capacity of information channel for quantitative image quality assessment was proposed to compare and assess the quality of the recorded images and imaging modes. The improvement of the quality of CPD imaging in multiresonance operation was confirmed.
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