We here report on atomic layer deposition (ALD) of the superconducting complex oxide La2-xSrxCuO4-y and provide details of the structural and electrical properties of such films. This is the first report on a complex oxide thin film with superconducting properties that has been deposited by atomic layer deposition.

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http://dx.doi.org/10.1039/c8cc04998jDOI Listing

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