Note: An absolute X-Y-Θ position sensor using a two-dimensional phase-encoded binary scale.

This Note presents a new absolute X-Y-Θ position sensor for measuring planar motion of a precision multi-axis stage system. By analyzing the rotated image of a two-dimensional phase-encoded binary scale (2D), the absolute 2D position values at two separated points were obtained and the absolute X-Y-Θ position could be calculated combining these values. The sensor head was constructed using a board-level camera, a light-emitting diode light source, an imaging lens, and a cube beam-splitter. To obtain the uniform intensity profiles from the vignette scale image, we selected the averaging directions deliberately, and higher resolution in the angle measurement could be achieved by increasing the allowable offset size. The performance of a prototype sensor was evaluated in respect of resolution, nonlinearity, and repeatability. The sensor could resolve 25 nm linear and 0.001° angular displacements clearly, and the standard deviations were less than 18 nm when 2D grid positions were measured repeatedly.