Inorganic semiconductors such as III-V materials are very important in our everyday life as they are used for manufacturing optoelectronic and microelectronic components with important applications span from energy harvesting to telecommunications. In some applications, these components are required to operate in harsh environments. In these cases, having waterproofing capability is essential. Here we demonstrate design and control of the wettability of indium phosphide based multilayer material (InP/InGaAs/InP) using re-entrant structures fabricated by a fast electron beam lithography technique. This patterning technique enabled us to fabricate highly uniform nanostructure arrays with at least one order of magnitude shorter patterning times compared to conventional electron beam lithography methods. We reduced the surface contact fraction significantly such that the water droplets may be completely removed from our nanostructured surface. We predicted the wettability of our patterned surface by modelling the adhesion energies between the water droplet and both the patterned surface and the dispensing needle. This is very useful for the development of coating-free waterproof optoelectronic and microelectronic components where the coating may hinder the performance of such devices and cause problems with semiconductor fabrication compatibility.
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http://dx.doi.org/10.1038/s41598-018-21864-2 | DOI Listing |
Sensors (Basel)
January 2025
Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China.
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December 2024
Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA 15213, USA.
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View Article and Find Full Text PDFTalanta
January 2025
Key Disciplines Lab of Novel Micro-Nano Devices and System Technology, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Shapingba, Chongqing, 400044, China; School of Optoelectronic Engineering, Chongqing University, Shapingba, Chongqing, 400044, China. Electronic address:
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December 2024
School of Microelectronics, Xi'an Jiaotong University, Xi'an 710049, China.
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December 2024
School of Microelectronics, Northwestern Polytechnical University, Xi'an 710129, China.
Serious electron leakage and poor hole injection efficiency are still challenges for deep ultraviolet AlGaN-based light-emitting diodes with a traditional structure in achieving high performance. Currently, the majority of research works concentrate on optimizing the structures of the electron blocking layer (EBL) and last quantum barrier (LQB) separately, rather than considering them as an integrated structure. Therefore, in this study, an Al-content-varied AlGaN composite last quantum barrier (CLQB) layer is proposed to replace the traditional EBL and LQB layers.
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