Single-phase cubic (FCC) vanadium nitride (VN) coatings with different preferential orientations and residual stresses were obtained as a function of ICP power. Microstructural, crystallographic and mechanical characterizations were performed by FE-SEM, AFM, XRD and nanoindentation. The results show that ICP has significant effects on coating's microstructure, structural and mechanical properties of VN coatings. With an increase in ICP power, coating microstructure evolved from a porous columnar structure to a highly dense one. Single-phase cubic (FCC) VN coatings with different preferential orientations and residual stresses were obtained as a function of ICP power. Average crystal grain sizes of single phase cubic VN coatings were decreased from 10.1 nm to 4.0 nm with an increase in ICP power. Maximum hardness of 28.2 GPa was obtained for the coatings deposited at ICP power of 200 W.
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| http://dx.doi.org/10.1166/jnn.2018.14975 | DOI Listing |
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