This work developed a method of femtosecond laser (fs-laser) parallel processing assisted by wet etching to fabricate 3D micro-optical components. A 2D fs-laser spot array with designed spatial distribution was generated by a spatial light modulator. A single-pulse exposure of the entire array was used for parallel processing. By subsequent wet etching, a close-packed hexagonal arrangement, 3D concave microlens array on a curved surface with a radius of approximately 120 μm was fabricated, each unit lens of which has designable spatial distribution. Characterization of imaging was carried out by a microscope and showed a unique imaging property in multi-planes. This method provides a parallel and efficient technique to fabricate 3D micro-optical devices for applications in optofluidics, optical communication, and integrated optics.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1364/OL.43.000831 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers.
Sensors (Basel)
October 2024
Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division.
View Article and Find Full Text PDFFabrication of Microstructured Hydrogels via Dehydration for On-Demand Applications.
Small
December 2024
Laboratory of Process Technology, NeptunLab, Department of Microsystems Engineering (IMTEK), Albert Ludwig University of Freiburg, 79110, Freiburg, Germany.
Microstructured hydrogels show promising applications in various engineering fields from micromolds to anisotropic wetting surfaces and microfluidics. Although methods like molding by, e.g.
View Article and Find Full Text PDFA novel, to the best of our knowledge, tunable multifocal liquid crystal microlens array (TMLCMA) was fabricated with a triple-electrode structure consisting of a large-hole, a small-hole array, and planar electrodes. The electro-optical performances of the TMLCMA are characterized, demonstrating the monofocal convex, multifocal convex, and multifocal concave functions when the TMLCMA is manipulated with various driving schemes. Furthermore, the homogenization of a laser beam is realized using the fabricated TMLCMA.
View Article and Find Full Text PDFMicrolens has significant applications in integrated micro-optical systems. Recently, multifocal microlens arrays are expected to extend the depth of field for imaging systems and realize a highly efficient laser beam homogenizer. This work presents what we believe to be a novel approach for developing a tunable multifocal liquid crystal microlens array (TMLCMA), which can be operated in convex and concave modes through voltage control schemes.
View Article and Find Full Text PDFAn Ultraviolet-Lithography-Assisted Sintering Method for Glass Microlens Array Fabrication.
Micromachines (Basel)
November 2023
State Key Laboratory of Photon-Technology in Western China Energy, Xi'an 710127, China.
Glass microlens arrays (MLAs) have tremendous prospects in the fields of optical communication, sensing and high-sensitivity imaging for their excellent optical properties, high mechanical robustness and physicochemical stability. So far, glass MLAs are primarily fabricated using femtosecond laser modification assisted etching, in which the preparation procedure is time-consuming, with each concave-shaped microlens being processed using a femtosecond laser point by point. In this paper, a new method is proposed for implementing large-scale glass MLAs using glass particle sintering with the assistance of ultraviolet (UV) lithography.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!