We propose a snapshot spectroscopic ellipsometry and its applications for real-time thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.
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| http://dx.doi.org/10.1364/OE.26.001333 | DOI Listing |
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