Fabrication of multiple nanopores in a SiN membrane via controlled breakdown.

Sci Rep

The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics, Nankai University, Tianjin, 300071, China.

Published: January 2018

AI Article Synopsis

  • - This paper introduces a method called Controlled Breakdown (CBD) for creating multiple nanopores in a silicon nitride membrane, allowing researchers to manage both how many nanopores are made and their sizes.
  • - The study reveals that, even though the process is somewhat random, the nanopores produced tend to be uniform in diameter, which can be influenced by the duration of exposure and the strength of the electric field used.
  • - The authors suggest that this approach simplifies fabrication, making it faster and less complicated than existing methods, with the potential to be integrated into optical systems for efficient testing and analysis.

Article Abstract

This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiN) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the same diameter. We propose a membrane resistance model to explain and control the multiple nanopores forming in the membrane. We prove that the membrane resistance can reflect the number of nanopores in the membrane and that the diameter of the nanopores is controlled by the exposure time and strength of the electric field. This controllable multiple nanopore formation via CBD avoids the utilization of complicated instruments and time-intensive manufacturing. We anticipate CBD has the potential to become a nanopore fabrication technique which, integrated into an optical setup, could be used as a high-throughput and multichannel characterization technique.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC5775244PMC
http://dx.doi.org/10.1038/s41598-018-19450-7DOI Listing

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