Optical microstructure array surfaces such as micro-lens array surface, micro-groove array surface etc., are being used in more and more optical products, depending on its ability to produce a unique or particular performance. The geometrical complexity of the optical microstructures array surfaces makes them difficult to be fabricated. In this paper, a novel method named fluid jet-array parallel machining (FJAPM) is proposed to provide a new way to generate the microstructure array surfaces with high productivity. In this process, an array of abrasive water jets is pumped out of a nozzle, and each fluid jet simultaneously impinges the target surface to implement material removal independently. The jet-array nozzle was optimally designed firstly to diminish the effect of jet interference based on the experimental investigation on the 2-Jet nozzles with different jet intervals. The material removal and surface generation models were built and validated through the comparison of simulation and experimental results of the generation of several kinds of microstructure array surfaces. Following that, the effect of some factors in the process was discussed, including the fluid pressure, nozzle geometry, tool path, and dwell time. The experimental results and analysis prove that FJAPM process is an effective way to fabricate the optical microstructure array surface together with high productivity.
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