Diffraction of partially-coherent light beams by microlens arrays.

The synthesis method including wave-optics and ray-tracing for the acceleration of the simulation of micro-optical systems has been developed. The effects of the spatial coherence and randomization of microlens array (MLA) parameters have been considered. The method based on coherent states representation for the calculation of the optical efficiency of microlens arrays taking into account the light source polarization has been developed. Numerical simulations of the intensity distributions and spreading angle of a diffracted beam have been carried out.