Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC5620990 | PMC |
| http://dx.doi.org/10.3390/s17092088 | DOI Listing |
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