Amorphous indium gallium zinc oxide (a-IGZO) powder was prepared by typical solution-based process and post-annealing process. The sample was used as sensor for detecting C₂H₅OH, H₂, and CO. Gas-sensing performance was found to be highly sensitive to C₂H₅OH gas in a wide range of concentration (0.5-1250 ppm) with the response of 2.0 towards 0.5 ppm and 89.2 towards 1250 ppm. Obvious difference of response towards C₂H₅OH, H₂, and CO was found that the response e.g., was 33.20, 6.64, and 2.84 respectively at the concentration of 200 ppm. The response time and recovery time of was 32 s and 14 s respectively towards 200 ppm concentration of C₂H₅OH gas under heating voltage of 6.5 V.
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| http://dx.doi.org/10.3390/s17061203 | DOI Listing |
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