Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC5389201 | PMC |
| http://dx.doi.org/10.3762/bjnano.8.76 | DOI Listing |
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