We describe a single-shot technique to measure areal profiles on optically smooth and stepped surfaces for applications where rapid data acquisition in non-cooperative environments is essential. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In the current paper a >20-fold increase in pixel utilisation is achieved through the use of a 2-D microlens array, that leads to a 35 × 35 channel system with an unambiguous depth range of 0.88 mm.

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http://dx.doi.org/10.1364/OE.25.008801DOI Listing

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