Modulated interaction in double-layer shape memory-based micro-designed actuators.

The effect of superposed transitions in actuators with layered shape memory alloy (SMA) films undergoing martensitic phase transformation is analyzed in terms of a model developed for two layers of different composition, deposited at the same temperature on a substrate. A significant difference is observed in the actuation versus temperature relationship, depending on the thermal and elastic properties of the SMA layers and their martensitic transformation temperature. The prediction of the actuation is exemplified using a multilayer model and is verified for a cantilever actuator with NiTi and NiMnGa layers deposited on a Si substrate. The model sets the ground for a smart selection of SMAs in order to achieve a modulated actuation.