Fast Industrial Inspection of Optical Thin Film Using Optical Coherence Tomography.

Sensors (Basel)

School of Electronics Engineering, College of IT Engineering, Kyungpook National University, 80 Daehak-ro, Bukgu, Daegu 41566, Korea.

Published: September 2016

An application of spectral domain optical coherence tomography (SD-OCT) was demonstrated for a fast industrial inspection of an optical thin film panel. An optical thin film sample similar to a liquid crystal display (LCD) panel was examined. Two identical SD-OCT systems were utilized for parallel scanning of a complete sample in half time. Dual OCT inspection heads were utilized for transverse (fast) scanning, while a stable linear motorized translational stage was used for lateral (slow) scanning. The cross-sectional and volumetric images of an optical thin film sample were acquired to detect the defects in glass and other layers that are difficult to observe using visual inspection methods. The rapid inspection enabled by this setup led to the early detection of product defects on the manufacturing line, resulting in a significant improvement in the quality assurance of industrial products.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC5087387PMC
http://dx.doi.org/10.3390/s16101598DOI Listing

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