We experimentally demonstrate a tunable Fano resonance which originates from the optical interference between two different resonant cavities using silicon micro-ring resonator with feedback coupled waveguide fabricated on silicon-on-insulator (SOI) substrate. The resonance spectrum can be periodically tuned via changing the resonant wavelengths of two resonators through the thermo-optic effect. In addition to this, we can also change the transmission loss of the feedback coupled waveguide (FCW) to tune the resonance spectrum by the injection free carriers to FCW. We also build the theoretical model and we analyze the device performance by using the scattering matrix method. The simulation results are in a good agreement with the experimental results. The measurement maximum extinction ratio of the Fano resonance is as high as 30.8dB. Therefore, the proposed device is a most promising candidate for high on/off ratio optical switching/modulating, high-sensitivity biochemical sensing.

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http://dx.doi.org/10.1364/OE.24.020187DOI Listing

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