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The effect of angular vibrations of the crystals in cryogenically cooled monochromators on the beam performance has been studied theoretically and experimentally. A simple relation between amplitude of the vibrations and size of the focused beam is developed. It is shown that the double-crystal monochromator vibrations affect not only the image size but also the image position along the optical axis. Several methods to measure vibrations with the X-ray beam are explained and analyzed. The methods have been applied to systematically study angular crystal vibrations at monochromators installed at the PETRA III light source. Characteristic values of the amplitudes of angular vibrations for different monochromators are presented.
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