Advanced doping technologies are key for the continued scaling of semiconductor devices and the maintenance of device performance beyond the 14 nm technology node. Due to limitations of conventional ion-beam implantation with thin body and 3D device geometries, techniques which allow precise control over dopant diffusion and concentration, in addition to excellent conformality on 3D device surfaces, are required. Spin-on doping has shown promise as a conventional technique for doping new materials, particularly through application with other dopant methods, but may not be suitable for conformal doping of nanostructures. Additionally, residues remain after most spin-on-doping processes which are often difficult to remove. In situ doping of nanostructures is especially common for bottom-up grown nanostructures but problems associated with concentration gradients and morphology changes are commonly experienced. Monolayer doping has been shown to satisfy the requirements for extended defect-free, conformal and controllable doping on many materials ranging from traditional silicon and germanium devices to emerging replacement materials such as III-V compounds but challenges still remain, especially with regard to metrology and surface chemistry at such small feature sizes. This article summarises and critically assesses developments over the last number of years regarding the application of gas and solution phase techniques to dope silicon-, germanium- and III-V-based materials and nanostructures to obtain shallow diffusion depths coupled with high carrier concentrations and abrupt junctions.
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http://dx.doi.org/10.1088/0957-4484/27/34/342002 | DOI Listing |
Nanotechnology
January 2025
Institute of Nano Science and Technology, Knowledge City, Sector 81, Mohali, 140306, INDIA.
This study investigates simple acetylenes substituted with phenylurea as a constant H-bonding unit (Alk-R) and varied hydrophobic units (R = H, Phenyl (Ph), Phenylacetylene (PA), Ph-NMe2) to understand self-assembly properties driven by synergistic non-covalent interactions. Our observations reveal hierarchical self-assembled fibrillar networks with luminescent needles, fibers, and flowers on nano- to micro-meter scales. Subtle changes in substituents led to significant differences: H, Ph, PA, and Ph-NMe2 produced needle-like crystals, dendritic nanofibers, microflakes, and no self-assembly, respectively.
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January 2025
School of Electrical Engineering, State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an Jiaotong University, Xianning West Road No.28 Xi'an Shannxi Province, Xi'an, Shaanxi, 710049, CHINA.
HfO-based ferroelectric (FE) thin films have gained considerable interest for memory applications due to their excellent properties. However, HfO₂-based FE films face significant reliability challenges, especially the wake-up and fatigue effects, which hinder their practical application. In this work, we fabricated 13.
View Article and Find Full Text PDFACS Appl Mater Interfaces
January 2025
State Key Laboratory of Materials-Oriented Chemical Engineering, College of Chemical Engineering, Nanjing Tech University, Nanjing 210009, China.
Mixed matrix membranes (MMMs) can significantly improve gas separation performance, but the type and state of the filler in the membrane matrix are key indicators for the development of MMMs. Therefore, in this work, 6FDA-DAM/ODA (1:1), metal-organic frameworks (MOFs) with different particle sizes (UiO-66 and UiO-66-NH) were synthesized, and then MOFs were doped into 6FDA-DAM/ODA to prepare MMMs. The effects of the dopant materials and their particle sizes on the gas separation performance of the membranes were investigated by testing the permeability of the MMMs to H, CO, CH, and N.
View Article and Find Full Text PDFACS Appl Mater Interfaces
January 2025
Department of Chemistry, Indian Institute of Technology Delhi, Hauz Khas, New Delhi 110016, India.
Hydrogen production via water-splitting or ammonia electrolysis using transition metal-based electrodes is one of the most cost-effective approaches. Herein, ca. 1-4% of Pt atoms are stuffed into a wolframite-type NiWO lattice to improve the electrocatalytic efficiency.
View Article and Find Full Text PDFChem Asian J
January 2025
University of Macau, Institute of Applied Physics and Materials Engineering, MACAO.
In recent years, carbon dots (CDs) with fluorescence imaging function have been widely used in biomedicine, electronic manufacturing and environmental monitoring. However, monochromatic fluorescence is often limited by the application environment and loses its effectiveness. Here, we carefully designed white fluorescent CDs (WF-CDs) by solvothermal method, which is used for fluorescence imaging applications under different environmental conditions.
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