AI Article Synopsis
- This paper examines the performance variations in heat flux sensors made using CMOS-compatible 3-in technology and how these variations relate to the materials used in manufacturing.
- It emphasizes the importance of understanding these variations to minimize production costs and reduce sensor defects during fabrication.
- Results indicate that the sensors have a sensitivity range of 3.15 to 6.56 μV/(W/m²) and resistances between 485 and 675 kΩ, with performance following a Gaussian distribution centered around 4.5 μV/(W/m²) and 573.5 kΩ.
Article Abstract
In this paper, we focus on the dispersion performances related to the manufacturing process of heat flux sensors realized in CMOS (Complementary metal oxide semi-conductor) compatible 3-in technology. In particular, we have studied the performance dispersion of our sensors and linked these to the physical characteristics of dispersion of the materials used. This information is mandatory to ensure low-cost manufacturing and especially to reduce production rejects during the fabrication process. The results obtained show that the measured sensitivity of the sensors is in the range 3.15 to 6.56 μV/(W/m²), associated with measured resistances ranging from 485 to 675 kΩ. The dispersions correspond to a Gaussian-type distribution with more than 90% determined around average sensitivity S e ¯ = 4.5 µV/(W/m²) and electrical resistance R ¯ = 573.5 kΩ within the interval between the average and, more or less, twice the relative standard deviation.
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Source |
|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934279 | PMC |
| http://dx.doi.org/10.3390/s16060853 | DOI Listing |
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