Hydrogenated amorphous silicon (a-Si:H) thin films on soda-lime glass substrates were deposited by plasma enhanced chemical vapor deposition (PECVD) using disilane and hydrogen as source gases. To study the influence of deposition pressure on the deposition rate, optical band gap and structure factor, a surface profilometer, an ultraviolet-visible spectrometer, a Fourier transform infrared (FTIR) spectrometer and a scanning electron microscopy (SEM) were used to characterize the deposited thin films. It is found that the deposition rate firstly increased and then decreased and the optical band gap monotonically decreased with the increasing deposition pressure. Moreover, the formation of SiH bond was preferable to the formation of SH₂ or SiH₃ bond when the deposition pressure was less than 210 Pa, while it was opposite when the deposition pressure is higher than 210 Pa. Finally, the deposition pressure in the range of 110~210 Pa was found to be more suitable for the preparation of high quality a-Si:H thin films.
Download full-text PDF |
Source |
|---|
Publication Analysis
Top Keywords
Similar Publications
Oxygen-Passivated Sulfur Vacancies in Monolayer MoS for Enhanced Piezoelectricity.
ACS Nano
January 2025
School of Engineering, RMIT University, 124 La Trobe Street, Melbourne, Victoria 3001, Australia.
Modern-day applications demand onboard electricity generation that can be achieved using piezoelectric phenomena. Reducing the dimensionality of materials is a pathway to enhancing the piezoelectric properties. Transition-metal dichalcogenides have been shown to exhibit high piezoelectricity.
View Article and Find Full Text PDFRapamycin protects glucocorticoid-induced glaucoma model mice against trabecular meshwork fibrosis by suppressing mTORC1/2 signaling.
Eur J Pharmacol
January 2025
Affiliated Eye Hospital of Nanchang University, Jiangxi Medical College, Nanchang University, Jiangxi Research Institute of Ophthalmology & Visual Science, Jiangxi Provincial Key Laboratory for Ophthalmology, Jiangxi Clinical Research Center for Ophthalmic Disease, Nanchang, China. Electronic address:
Systemic or local use of glucocorticoids (GCs) can induce pathological elevation of intraocular pressure (IOP), potentially leading to permanent visual loss. Previous studies have demonstrated that rapamycin (Rapa) inhibits the activation of retinal glial cells and the production of neuroinflammation, achieving neuroprotective goals. However, there has been little research on the effect of Rapa on the trabecular meshwork (TM).
View Article and Find Full Text PDFSelf-Assembling of Multilayered Polymorphs with Ion Beams.
Nano Lett
January 2025
Department of Physics, Centre for Materials Science and Nanotechnology, University of Oslo, PO Box 1048 Blindern, N-0316 Oslo, Norway.
Polymorphism determines significant variations in materials' properties by lattice symmetry variation. If they are stacked together into multilayers, polymorphs may work as an alternative approach to the sequential deposition of layers with different chemical compositions. However, selective polymorph crystallization during conventional thin film synthesis is not trivial; changes of temperature or pressure when switching from one polymorph to another during synthesis may cause degradation of the structural quality.
View Article and Find Full Text PDFA novel 3D-printed sample preparation method for benzodiazepine quantification in human serum.
Anal Chim Acta
February 2025
Department of Pharmaceutical Chemistry, Medical University of Gdansk, Hallera 107, 80-416, Gdansk, Poland.
Background: Benzodiazepine abuse remains a significant public health concern. Current sample preparation methods for benzodiazepine analysis from human serum often involve complex procedures that require large sample volumes and extensive organic solvent use. To address these limitations, this study presents a novel and efficient sample preparation method utilizing 3D-printed sorbent devices.
View Article and Find Full Text PDFInfluence of Different Mixing Methods for Cementitious Capillary Crystalline Waterproofing Materials on the Self-Healing Capacity of Concrete Under Various Damage Types.
Materials (Basel)
January 2025
Suzhou Guardex New Material Technology Co., Ltd., Suzhou 210500, China.
Cementitious Capillary Crystallization Waterproofing Material (CCCW), as an efficient self-healing agent, can effectively repair damage in concrete structures, thereby extending their service life. To address the various types of damage encountered in practical engineering applications, this study investigates the impact of different mixing methods for CCCW (including internal mixing, curing, and post-crack repair) on the multi-dimensional self-healing performance of concrete. The self-healing capacity of concrete was evaluated through water pressure damage self-healing tests, freeze-thaw damage self-healing tests, mechanical load damage self-healing tests, and crack damage self-healing tests.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!