AI Article Synopsis
- The report discusses a cost-effective digital MEMS vibration meter that measures the RMS acceleration of vibrations.
- The device features a cantilever beam, about 500 µm long, with a piezoresistor at its base that responds to vibrations by bending.
- The bending generates changes in resistance, which, combined with a specific signal-processing technique, allow for the approximation of the RMS acceleration experienced by the meter.
Article Abstract
This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.
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Source |
|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4656009 | PMC |
| http://dx.doi.org/10.6028/jres.112.009 | DOI Listing |
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