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This paper presents the control performance of a linear motion stage driven by Voice Coil Motor (VCM). Unlike the conventional VCM, the stator of this VCM is regulated, which means it can be adjusted as a floating-stator or fixed-stator. A Multi-Mode Sliding Mode Control (MMSMC), including a conventional Sliding Mode Control (SMC) and an Integral Sliding Mode Control (ISMC), is designed to control the linear motion stage. The control is switched between SMC and IMSC based on the error threshold. To eliminate the chattering, a smooth function is adopted instead of a signum function. The experimental results with the floating stator show that the positioning accuracy and tracking performance of the linear motion stage are improved with the MMSMC approach.
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| http://dx.doi.org/10.1063/1.4942641 | DOI Listing |
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