A newly developed flexible calibration algorithm for telecentric 3D measurement systems is presented in this paper. We theoretically analyzed the similarities and differences between the telecentric and entocentric system. The telecentric system can be calibrated with the aid of the traditional 2D planar calibration method. An additional two-step refining process is proposed to improve the calibration accuracy effectively. With the calibration and refining algorithm, an affine camera can be calibrated with a reprojection error of 0.07 pixel. A projector with small field of view (FOV) is applied to achieve a full 3D reconstruction in our profilometry system. Experiments with a prototype demonstrate the validation and accuracy of the proposed calibration algorithm and system configuration. The reconstruction accuracy can achieve 5 µm with a measurement FOV of 28.43 mm×21.33 mm and a working distance of 110 mm.

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http://dx.doi.org/10.1364/OE.24.001222DOI Listing

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