Diamond-turned aluminum mirrors have been widely used in modern optical systems. However, the machined surfaces have characteristic periodic tool marks, which contribute to reduced optical performance by creating effects such as scattering and distortion. This paper develops a new polishing technology to polish aluminum mirrors directly to remove tool marks and improve surface quality and surface accuracy. A Taguchi experiment was used to obtain optimal polishing conditions for reducing surface roughness, and computer-controlled optical surfacing technology was employed for form correction of aluminum mirrors.
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| http://dx.doi.org/10.1364/AO.54.007835 | DOI Listing |
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- Current polishing methods struggle to maintain consistent surface roughness between edges and inner regions, prompting the development of a new sub-aperture polishing technique using chemical mechanical action.
- A compliant polishing pad combined with a rigid tool holder was designed to maintain constant pressure during the polishing process, improving uniformity.
- Experimental results show significant enhancements in surface roughness, reducing average roughness from 8.82 nm to 1.71 nm, confirming the effectiveness of this new method in achieving better surface consistency.
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