The inherent residual tool marks (RTM) with particular patterns highly affect optical functions of the generated freeform optics in fast tool servo or slow tool servo (FTS/STS) diamond turning. In the present study, a novel biaxial servo assisted fly cutting (BSFC) method is developed for flexible control of the RTM to be a functional micro/nanotexture in freeform optics generation, which is generally hard to achieve in FTS/STS diamond turning. In the BSFC system, biaxial servo motions along the z-axis and side-feeding directions are mainly adopted for primary surface generation and RTM control, respectively. Active control of the RTM from the two aspects, namely, undesired effect elimination or effective functionalization, are experimentally demonstrated by fabricating a typical F-theta freeform surface with scattering homogenization and two functional microstructures with imposition of secondary phase gratings integrating both reflective and diffractive functions.
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