A kind of multilayer ceramic capacitors (MLCCs) has been verified to have good micro-actuating properties, thus making them good candidates for nano-positioning. In this paper, we successfully employed the MLCCs as lateral scanners for a tripod scanning stage. The MLCC-based lateral scanners display hysteresis under 1.5% and a nonlinearity less than 2% even with the simplest open-loop voltage drive. The developed scanning stage was integrated into a commercial AFM to evaluate its imaging performance. Experimental results showed that sample images with high fidelities were obtained. SCANNING 38:184-190, 2016. © 2015 Wiley Periodicals, Inc.
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