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| http://dx.doi.org/10.3760/cma.j.issn.0253-2727.2015.07.020 | DOI Listing |
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A novel piezoresistive cantilever microprobe (PCM) with an integrated electrothermal or piezoelectric actuator has been designed to replace current commercial PCMs, which require external actuators to perform contact-resonance imaging (CRI) of workpieces and avoid unwanted "forest of peaks" observed at large travel speed in the millimeter-per-second range. Initially, a PCM with integrated resistors for electrothermal actuation (ETA) was designed, built, and tested. Here, the ETA can be performed with a piezoresistive Wheatstone bridge, which converts mechanical strain into electrical signals by boron diffusion in order to simplify the production process.
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