A modified Katsumata probe--Ion sensitive probe for measurement in non-magnetized plasmas.

A modified Katsumata probe has been developed for measurement of ion velocity distribution function (IVDF) in technological non-magnetized plasmas. A simple construction of the modified Katsumata probe consists of adding a pair of permanent Sm-Co magnets in front of Katsumata probe. A comparative study regarding IVDF measurement in a high power impulse magnetron sputtering system operating in pure argon atmosphere by means of developed modified Katsumata probe and commercially available gridded retarding field analyzer (RFA) has been carried out. A time-resolved measurement of IVDF for two different pressures whilst other plasma conditions have been kept unchanged has revealed that the main advantage of the modified Katsumata probe compared to the RFA consists in significantly smaller angular aperture of entrance orifice of modified Katsumata probe being approximately 15° in comparison with a commercial RFA having angular aperture more than 160°. It leads in much better velocity resolution in measured IVDF since the transversal part of velocity vector is much more suppressed compared to RFA. Furthermore, the modified Katsumata probe less suffers from collisions of ions in the space charge sheath in front or inside of the probe compared to the RFA.