[Optical Design of Miniature Infrared Gratings Spectrometer Based on Planar Waveguide].

In order to miniaturize an infrared spectrometer, we analyze the current optical design of miniature spectrometers and propose a method for designing a miniature infrared gratings spectrometer based on planar waveguide. Common miniature spectrometer uses miniature optical elements to reduce the size of system, which also shrinks the effective aperture. So the performance of spectrometer has dropped. Miniaturization principle of planar waveguide spectrometer is different from the principle of common miniature spectrometer. In planar waveguide spectrometer, the propagation of light is limited in a thin planar waveguide, which looks like the whole optical system is squashed flat. In the direction parallel to the planar waveguide, the light through the slit is collimated, dispersed and focused. And a spectral image is formed in the detector plane. This propagation of light is similar to the light in common miniature spectrometer. In the direction perpendicular to the planar waveguide, light is multiple reflected by the upper and lower surfaces of the planar waveguide and propagates in the waveguide. So the size of corresponding optical element could be very small in the vertical direction, which can reduce the size of the optical system. And the performance of the spectrometer is still good. The design method of the planar waveguide spectrometer can be separated into two parts, Czerny-Turner structure design and planar waveguide structure design. First, by using aberration theory an aberration-corrected (spherical aberration, coma, focal curve) Czerny-Turner structure is obtained. The operation wavelength range and spectral resolution are also fixed. Then, by using geometrical optics theory a planar waveguide structure is designed for reducing the system size and correcting the astigmatism. The planar waveguide structure includes a planar waveguide and two cylindrical lenses. Finally, they are modeled together in optical design software and are optimized as a whole. An infrared planar waveguide spectrometer is designed using this method. The operation wavelength range is 8 - 12 μm, the numerical aperture is 0.22, and the linear array detector contains 64 elements. By using Zemax software, the design is optimized and analyzed. The results indicate that the size of the optical system is 130 mm x 125 mm x 20 mm and the spectral resolution of spectrometer is 80 nm, which satisfy the requirements of design index. Thus it is this method that can be used for designing a miniature spectrometer without movable parts and sizes in the range of several cubic centimeters.